TRCX: doping process analysis

During LTPS fabrication, the active layer is metallized by ion implantation using a self-aligned mask.When calculating capacitance via TRCX, the same principles as for the actual process apply.Engineers can extract the exact capacitance based on the real 3D structure and analyze the potential distribution before and after ion implantation in the active layer, as shown in the figure below.

(a)FIB

(b) Comparison before and after doping