ASML launched the first generation HMI multi beam detector: the speed is increased by 600%, which is suitable for 5nm and more advanced processes

Under the existing semiconductor process system ,7nm The following processes must be used EUV lithography , And as a global EUV The only supplier of lithography machines , In the Netherlands ASML The company's EUV The supply of lithography machines has always been in short supply . In recent days, ,ASML The company has entered the field of semiconductor testing equipment , Launched the first generation HMI Multi beam detector HMI eScan1000, Apply to 5nm And more advanced technology , Make the speed increase 600%.

With the continuous improvement of the manufacturing process , Wafer manufacturing is also becoming more and more complex , This will also lead to more errors in the wafer ,HMI eScan1000 It's a set of HMI Detection system of multi beam technology , There are also complex optoelectronic systems inside , Capable of producing 、 Control multiple electron beams , Then analyze the wafer quality according to the reflected electron beam imaging , And there is a high-speed platform to control the number of wafers tested , There is also a computing system to process the data of the electron beam .

Simply speaking ,ASML Developed this HMI eScan1000 The machine is a system to verify the quality of wafers produced by advanced technology , The more advanced the technology is , The more important the detection system is , Its detection accuracy 、 Throughput determines the efficiency of production .

ASML Of HMI eScan1000 The breakthrough is that it can produce at the same time 、 Control nine electron beams , So the production capacity has increased 600%, It can greatly reduce the time of wafer quality analysis .

at present HMI eScan1000 It can be used for 5nm And the following advanced wafer testing , It has been delivered to the customer for testing and verification , future ASML More beam testing equipment will be launched to meet customers' requirements for advanced technology .

edit ： Smart core - Woods