The ASML lithography machine purchased by SMIC international entered the factory smoothly, but it is not a non EUV lithography machine!

As the largest and most advanced wafer foundry in China , SMIC international still did not stop production during the epidemic , At the same time, it is expanding 14nm And other advanced processes . According to media reports ,3 month 4 Japan , SMIC international from the Netherlands ASML An imported large-scale lithography machine has successfully entered the Shenzhen plant .

SMIC said , A series of service measures of Pingshan customs , It ensures that the equipment enters the plant area for installation and production at the first time . This lithography machine will be mainly used for the production line expansion after the resumption of production . After the expansion of the production line , It is expected to increase for enterprises throughout the year 10% Revenues around .

According to the official website , SMIC Shenzhen plant is located in Pingshan District, Shenzhen , The first phase of 200mm（8 Inch ） Chip foundry can provide products from 0.35μm To 90nm Wafer processing services .“ The successful expansion of Shenzhen plant can support more 200mm Capacity demand , And meet the growing needs of customers and the market ”.

The relevant reports did not mention the specific model of the lithography machine purchased by SMIC this time , So it also triggered some speculation . Some netizens believe that this photolithography machine is likely to be the precursor of SMIC ASML Order the most advanced EUV lithography . however , In fact, this machine should still be 193nm Wavelength DUV Series photoresist . because , SMIC has already said , This machine is used for the expansion of the existing production line . At present, the products provided by SMIC Shenzhen plant are mainly 0.35μm To 90nm. and EUV Lithography machine is mainly aimed at 7nm And the following advanced processes . SMIC international orders EUV Lithography machine is also mainly used for advanced process testing and testing .

3 month 6 On the afternoon of Sunday , SMIC international also confirmed to the media , The lithography machine belongs to the conventional equipment import , It is not the extreme ultraviolet lithography machine that the outside world cares about （EUV）. meanwhile , The company added ：“EUV The lithography machine is a major event , Relevant developments will be officially released by SMIC .”

As early as 2018 year 5 month , SMIC confirmed that it had sent a report to the Netherlands ASML I ordered one of the latest EUV lithography , Value up to 1.5 Billion dollars , The original plan was 2019 Delivery at the beginning of the year . But due to the obstruction of the United States ,ASML Has not received a new license from the Dutch government , It also leads to ASML Unable to deliver to SMIC EUV lithography .

Although advanced EUV The lithography machine inlet is blocked , However, it has not affected the current R & D and production progress of SMIC .

last year , Zhongxin International 14nm Has been successfully mass produced , And in the fourth quarter of last year 14nm Also obtained about 769 $10000 revenue . This year, 1 month , According to the Digitimes The report , Huawei's Hisilicon semiconductor company has begun to sell to SMIC 14nm Process order , Part of it was originally OEM by TSMC 14nm The chip will be OEM by SMIC .

Besides , Following 2 month 19 Announced the purchase of American pan forest company 6 After billion dollars of equipment , SMIC recently announced 11 Billion dollars ( About us 77 One hundred million yuan ) The big list of —— Materials will be applied from the United States 、 Tokyo electronics company of Japan purchases equipment . And this is also considered by the outside world , This is to further improve 14nm The capacity of the process .

According to SMIC estimates , stay 2020 end of the year ,14nm The capacity of wafer will be the current 3~5 times , Up to 15000 slice / month .

in addition , For subsequent advanced processes , At the previous earnings meeting , China Core International Co., Ltd CEO Dr. Liang Mengsong also made public for the first time the follow-up of SMIC N +1、N +2 Process .

Dr. liangmengsong said , Zhongxin International N 1 Technology and existing 14nm Compared with technology , Improved performance 20%, Reduced power consumption 57%, The logical area has shrunk 63%,SoC The area has been reduced 55%. From the data of logical area reduction , Should be 7nm process . Dr. Liang Mengsong also said ,N +1 The power consumption and stability of the modern technology are similar to 7nm The process is very similar , But the performance is lower （ The industry standard is to improve 35%）, So SMIC International N +1 The process is mainly for low-power applications . And in the N +1 after , There will be N +2, These two processes are similar in power consumption , The difference lies in performance and cost ,N +2 Obviously for high performance , The cost will also increase .

Besides , Dr. Liang Mengsong also said , In the current environment ,N +1、N +2 I can't use modern technology EUV process , Wait until the equipment is ready ,N +2 Then the process will turn EUV Photolithography . This also means the following 7nm process , SMIC does not need EUV Lithography machine can also achieve mass production .

As for the launch time , In the previous financial statements , Dr. Liang Mengsong mentioned that he would be in 2020 Start trial production at the end of the year , And the real mass production may have to wait until 2021 Years. .

edit ： Smart core - Woods