A complete set of indicators for the 10000 class clean room of electronic semiconductors

Indicators of electronic semiconductor 10000 class clean room

One 、 The standard of 10000 class clean room ( Defined by the number of dust particles and microorganisms ):

1. Allowable number of dust particles ( Per cubic meter ): Greater than or equal to 0.5 The number of particles in microns shall not exceed 350000 individual ; Greater than or equal to 5 The number of particles in microns shall not exceed 2000 individual . You can use DPC-2602 Dust particle counter for movement detection .

2. Allowable number of microorganisms : The number of planktonic bacteria per cubic meter shall not exceed 100 individual ; The number of settling bacteria per Petri dish shall not exceed 3 individual .

Two 、 The main testing standards of 10000 class clean rooms include ：

 1. Detection of air velocity and its uniformity . This test is the premise of other tests of the effect of the clean room , The purpose of this test is to determine the average airflow flux and its uniformity in the working area of the one-way flow clean room .

 2. Air volume detection of system or room .

 3. Detection of indoor cleanliness . The detection of cleanliness is to determine the air cleanliness level that can be achieved in a clean environment , Particle counter can be used to detect .

 4. Detection of self purification time . By determining the self purification time , Find out the ability to restore the original cleanliness in case of pollution in the clean room .

 5. Air flow pattern detection .

 6. Noise detection .

 7. Illumination detection . The purpose of illuminance detection is to determine the illuminance level and uniformity of the clean room .

 8. Vibration detection . The purpose of vibration detection is to identify the vibration amplitude of each indication in the clean room .

 9. temperature 、 Humidity detection . temperature 、 The purpose of humidity detection is to change the temperature 、 The ability to adjust humidity to a certain limit . Its content includes detecting the air supply temperature of the dust-free room , Detect the air temperature of representative measuring points , Detect the air temperature at the center of the clean room , Detect the air degree at the sensitive element , Detect the relative temperature of indoor air , Check the return air temperature .

 10. Detection of total air volume and fresh air volume .

DPC-online-1A The dust particle counter clean environment online monitoring system is mainly used for real-time monitoring of environmental parameters in the clean room , And complete data storage 、 Management and other functions , The system uses Ethernet communication technology , By the server 、 Router 、 Workstation and various monitoring sensors , It can realize the cleanliness of the clean room 、 Temperature and humidity 、 Differential pressure 、 Real time monitoring of wind speed and other parameters .DPC-online-1A Clean environment online monitoring system can be widely used in clean room monitoring 、 Trend analysis 、 Indoor air quality monitoring （IAQ） etc. .

 

When testing whether the 10000 grade clean room meets the standard, it is recommended to use the testing instrument of plody measurement and control . As a manufacturer specializing in dust particle counters and other clean room detection instruments , The leading product of plody measurement and control （ Dust particle counter 、 Microenvironment detector, etc ） It has been widely used in Medical Pharmacy 、 Food Hygiene 、 Precision machinery and other fields , It is a trustworthy manufacturer ！