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MOS tube parameters μ A method of Cox
2022-07-07 06:49:00 【Carol0630】
It is known that tox It can be counted as COX, In inverse proportion .
dc After the simulation ,print model parameter( It could be dc operating point), find tox and u0 These two parameters ,tox Is the thickness of oxide layer , It can be calculated according to this Cox,u0 It's the mobility
The basic unit is changed into fF/um^2 It's a good choice .
Mainly Toxe, the electric gate oxide thickness, stay mrtlMOD=1 when , Toxe=EOT
Toxp For reference ,the physical gate oxide thickness
Toxm It seems to be just a right , In the calculation K1/K2 When used (Toxe/Toxm)
These three values seem to have to be positive . If you do SS/FF corner It is possible to scale up and down the three values at the same time
Required parameters :
epsrox: Relative vacuum dielectric constant
toxe: Electrical equivalent gate oxide thickness , Behind the toxn5 Is the coefficient multiplied by different process angles (tt Under process angle toxn5 Namely 1), So we can just focus on the front part
toxm: Used for parameter extraction TOX value
vth0: Threshold voltage , Behind the dvth0n5 Is the threshold voltage deviation value under different process angles
u0: Carrier mobility under the weak field , The following parameters are the same
Then calculate the parameters according to the formula ( There is an example of this ,bsim The parameter units inside should be international standard units , Just pay attention to the unit when calculating )
Reference resources : MOS Tube parameters μCox A way to get
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